I loko o ke ao nanometer o ka lithography semiconductor, ʻo ka haʻalulu liʻiliʻi loa o ke kūkulu ʻana a i ʻole ka hoʻonui ʻana o ka wela microscopic hiki ke hoʻolilo i kahi wafer silicon multi-million-dollar i mea ʻole. Ke neʻe nei ka ʻoihana i nā node 2nm a ma ʻō aku, ʻaʻole nā mea i hoʻohana ʻia no nā kumu mīkini he "kākoʻo" wale nō - he poʻe komo ikaika lākou i ka ʻimi ʻana i ka pololei.
Ma ZHHIMG, ke nīnau nui ʻia nei mākou e nā OEM honua: Pono anei mākou e hoʻomau me ke kūpaʻa i hōʻoia ʻia o ka granite precision, a i ʻole ua hiki i ka manawa e hoʻololi ai i nā keramika loea holomua? Aia ka pane i ka physics kikoʻī o kāu noi.
ʻO ke Kino o ke Paʻa: Granite vs. Ceramic
I ka hoʻohālikelike ʻananā ʻāpana granite kikoʻīa me nā lālā seramika, pono mākou e nānā i ka "trinity hemolele" o ka ʻenekinia precision: Damping, Thermal Stability, a me Stiffness.
1. Hoʻemi ʻana i ka haʻalulu: Ka Pōmaikaʻi o ka Microstructure Kūlohelohe
ʻO ka haʻalulu ka ʻenemi o ka throughput. ʻO Granite, kahi pōhaku igneous kūlohelohe, he ʻano polycrystalline paʻakikī e hana ana ma ke ʻano he mea hoʻopau haʻalulu kūlohelohe. ʻO kēia friction kūloko e ʻae i ka granite e hoʻokuʻu i ka ikehu mechanical me ka ʻoi aku ka maikaʻi ma mua o ka hapa nui o nā mea synthetic.
I ka hoʻohālikelike ʻana, ʻo nā keramika holomua e like me Silicon Carbide (SiC) a i ʻole Alumina he ʻoʻoleʻa loa. ʻOiai he pono kēia ʻoʻoleʻa no ka pane alapine kiʻekiʻe, hāʻawi nā keramika i ka emi ʻana o ka damping kūloko. I loko o kahi kaiapuni lithography, kahi e neʻe ai nā pae me ka wikiwiki loa, hāʻawi kahi kumu granite mai ZHHIMG i ke kaiapuni "mālie" e pono ai no nā optics e noho kūpono.
2. Nā Dynamics Thermal: Ke hoʻokele nei i ka Micron
ʻO ka hoʻonui wela pinepine ka pilikia i ka pololei o ka wā lōʻihi. He haʻahaʻa loa ka coefficient o ka hoʻonui wela (CTE) o ka granite kūlohelohe, ma kahi o 5 × 10^{-6}/K a i 6 × 10^{-6}/K.
Hiki i nā keramika holomua ke hoʻokō i nā waiwai CTE haʻahaʻa loa, akā pinepine lākou i ka inertia thermal haʻahaʻa. ʻO ke ʻano kēia, ʻoiai lākou e hoʻonui iki ana i ka huina, pane wikiwiki lākou i nā loli o ka mahana ambient. Hana ka nui o ka thermal mass o Granite ma ke ʻano he "buffer," e lilo ia i koho makemake ʻia no ka nui o ka nuinā kumu mīkini lithographykahi e pono ai ke kaiapuni e noho paʻa no nā hola o ka hana mau.
Nā Mea Hana no ka Palena Lithography
ʻO ka mīkini lithography hou paha ka ʻāpana lako paʻakikī loa i kūkulu ʻia. No nā kiʻikuhi kūkulu nui, ua hilinaʻi ka ʻoihana i ka wā ma muaNā ʻāpana Granite Precisionma muli o ko lākou ʻano non-magnetic a me ke kūpaʻa ʻana i ka corrosion.
Eia nō naʻe, no nā ʻāpana neʻe wikiwiki kikoʻī i loko o ka lithography stack—e like me nā wafer chucks a i ʻole nā paepae pōkole—ke piʻi nei ka honua o nā keramika ma muli o ko lākou ratio stiffness-to-weight kiʻekiʻe. Ma ZHHIMG, ʻike mākou i ka wā e hiki mai ana ʻaʻole ma ke ʻano he hoʻokūkū ma waena o kēia mau mea, akā ma ke ʻano he hoʻohui hybrid hoʻolālā. Ma ka hoʻohana ʻana i kahi kumu granite no ke kahua a me ka keramika no nā ʻāpana kiʻekiʻe-dynamic, hiki i nā ʻenekinia ke hoʻokō i ke kaulike hope loa o ka damping a me ka wikiwiki.
No ke aha ʻo ZHHIMG ka mea hoʻolako honua makemake nui ʻia
Ma ke ʻano he alakaʻimea hoʻolako i nā ʻāpana granite kikoʻī, Hoʻomaopopo ʻo ZHHIMG ʻaʻole wale ka pololei e pili ana i ka mea maka; e pili ana ia i ka metrology ma hope ona. Hoʻohana kā mākou hale hana i ka vacuum-degassing no nā ʻākoakoa maʻamau a pau a me nā ʻano hana lapping kiʻekiʻe e ʻoi aku ma mua o nā kūlana DIN 876 Grade 00.
He loea mākou i:
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Nā Kumu Granite Maʻamau no OEM: Nā geometries i hana ʻia me nā hoʻokomo wili i hoʻohui ʻia no nā alakaʻi linear.
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Nā ʻĀpana Lithography Paʻakikī: Ke hana ʻana i nā kahua nui e mālama i ka pālahalaha i loko o 1 micron ma luna o kekahi mau mika.
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Metrology Kiʻekiʻe: Ke hāʻawi nei i nā kūlana kuhikuhi no nā lako nānā koʻikoʻi loa o ka honua.
Hopena: Ke Ala Hoʻolālā i mua
ʻO ke koho ʻana ma waena o ka granite a me ka keramika e pono ai ka hoʻomaopopo hohonu ʻana i ke ʻano hana o kāu mīkini. ʻOiai ke hāʻawi nei nā keramika i ka paʻakikī alapine kiʻekiʻe, ʻaʻole i kūlike ka damping kūlohelohe a me ka nui wela o ka granite no ke kūpaʻa nui.
I ko mākou nānā ʻana i ka makahiki 2026, ke hoʻomau nei ʻo ZHHIMG i ka hana hou ma ke kihi o ka pōhaku kūlohelohe a me nā composites holomua. ʻAʻole mākou e hāʻawi wale i kahi kahua; hāʻawi mākou i ka maopopo e hana kāu lako i kona palena kumumanaʻo.
E kāhea aku i ka hui ʻenekinia ZHHIMG i kēia lā e loaʻa i kahi pepa ʻikepili hoʻohālikelike loea a i ʻole e kūkākūkā i kāu mau koi papahana maʻamau.
Ka manawa hoʻouna: Ian-26-2026