Ma nā kahua o ka hana pololei a me ka noiʻi ʻepekema, ʻo ka palahalaha o nā papa kuhikuhi granite kahi hōʻailona koʻikoʻi e hōʻoia i ka pololei o nā mea hana. ʻO kēia ka ʻōlelo kikoʻī i nā ʻano hana ʻike nui a me kā lākou kaʻina hana no ʻoe. ʻ
I. Laser interferometer kaʻimi ʻana
ʻO ka laser interferometer ka mea hana i makemake ʻia no ka ʻike palahalaha kiʻekiʻe. E lawe i ka ZYGO GPI XP laser interferometer ma ke ʻano he laʻana, hiki i kāna hoʻonā ke hiki i 0.1nm. I ka hana ʻana i ka ʻike, e hoʻopololei mua i ke kumu māmā o ka interferometer me ka paepae a hoʻokaʻawale i ka ʻili o ka paepae i nā ʻāpana 50mm × 50mm. Ma hope mai, ua hōʻiliʻili ʻia ka ʻikepili fringe interference i kēlā me kēia kiko, a ua hoʻopili ʻia ka ʻikepili a hoʻopaʻa ʻia me ka Zernike polynomial e loaʻa ai ka hewa flatness. Pili kēia ʻano hana i nā paepae kikoʻī kiʻekiʻe a hiki ke ʻike i nā hewa flatness o ≤0.5μm/m². Hoʻohana maʻamau ia i ka ʻike ʻana i nā mīkini kiʻi kiʻi kiʻi kiʻekiʻe a me nā pae mīkini ana ʻekolu-coordinate kiʻekiʻe. ʻ
Ii. ʻO ke ʻano papa helu uila
He mea maʻalahi ka ʻike ʻana i ka pae uila e hana a maikaʻi loa. Ua koho ʻia ka pae uila TESA A2 (me ka hoʻonā ʻana o 0.01μm/m) a hoʻonohonoho ʻia ma kahi ʻano 9 × 9 ma ka ʻaoʻao X/Y axis o ke kahua. Ma ka hōʻiliʻili pū ʻana i ka ʻikepili inclination o kēlā me kēia pae a laila hoʻohana i ke ʻano huinahā liʻiliʻi no ka helu ʻana, hiki ke loaʻa pololei ka waiwai palahalaha. Hiki i kēia ʻano hana ke ʻike pono i ka concavity kūloko a me nā kūlana convexity o ka paepae. No ka laʻana, hiki ke ʻike ʻia kahi fluctuation o 0.2μm i loko o kahi ākea 50mm, kahi kūpono no ka ʻike wikiwiki i ka hana nui. ʻ
Iii. Optical Flat Crystal Method
He kūpono ke ʻano ʻano aniani opitika no ka ʻike ʻana i nā paepae wahi liʻiliʻi. E hoʻopaʻa paʻa i ka aniani palahalaha opitika i ka ʻili e hoʻāʻo ʻia ma luna o ka paepae a nānā i nā kihi hoʻopilikia i hana ʻia ma waena o lākou ma lalo o ka mālamalama o kahi kumu kukui monochromatic (e like me ke kukui sodium). Inā he mau kaha pololei nā kaha, hōʻike ia i ka palahalaha maikaʻi. Inā ʻike ʻia nā kaha ʻōniʻoniʻo, e helu i ka hewa palahalaha ma muli o ke ʻano o ka curvature kaha. Ke hōʻike nei kēlā me kēia kāʻei curved i kahi ʻokoʻa kiʻekiʻe o 0.316μm, a hiki ke loaʻa ka ʻikepili palahalaha ma o ka hoʻololi maʻalahi. ʻ
ʻEhā. ʻEkolu-coordinate Measuring machine Inspection method
Hiki i ka mīkini ana ʻekolu ke hoʻokō i ke ana kikoʻī kiʻekiʻe ma kahi ākea ʻekolu. E kau i ka paepae pōhaku ma luna o ka papa hana o ka mīkini ana a hoʻohana i ka ʻimi no ka hōʻiliʻili like ʻana i ka ʻikepili mai nā helu ana he nui ma ka ʻili o ka paepae. Hoʻoponopono ka ʻōnaehana mīkini ana a hoʻopaʻa ʻia i kēia mau ʻikepili e hana i kahi hōʻike palahalaha o ka paepae. ʻAʻole hiki i kēia ʻano ke ʻike i ka palahalaha wale nō, akā loaʻa pū kekahi i nā ʻāpana geometric ʻē aʻe o ka paepae i ka manawa like, a kūpono no ka ʻike piha ʻana i nā paepae granite nui. ʻ
ʻO ka ʻike ʻana i kēia mau ʻano ʻike hiki ke kōkua iā ʻoe e loiloi pololei i ka palahalaha o ka paepae precision granite a hāʻawi i kahi hōʻoia hilinaʻi no ka hana paʻa o nā mea hana pololei.
Ka manawa hoʻouna: Mei-29-2025