Nā ʻano ʻike no ka pālahalaha o nā kahua kikoʻī granite.

Ma nā kahua o ka hana pololei a me ka noiʻi ʻepekema, ʻo ka pālahalaha o nā kahua kikoʻī granite kahi hōʻailona koʻikoʻi e hōʻoia i ka pololei o nā lako. Eia kahi hoʻolauna kikoʻī i kekahi mau ʻano ʻike nui a me kā lākou mau kaʻina hana no ʻoe.
I. Ke ʻano ʻike interferometer laser
ʻO ka interferometer laser ka mea hana makemake nui ʻia no ka ʻike ʻana i ka pālahalaha kiʻekiʻe. E lawe i ka interferometer laser ZYGO GPI XP ma ke ʻano he laʻana, hiki i kona hoʻonā ke hiki i ka 0.1nm. I ka wā e hana ai i ka ʻike ʻana, e hoʻohālikelike mua i ke kumu kukui o ka interferometer me ka paepae a puʻunaue i ka ʻili o ka paepae i nā wahi grid 50mm × 50mm. Ma hope mai, ua hōʻiliʻili ʻia nā ʻikepili palena hoʻopilikia kiko ma ke kiko, a ua hoʻokomo ʻia a kālailai ʻia nā ʻikepili me ka hoʻohana ʻana i ka polynomial Zernike e loaʻa ai ka hewa pālahalaha. Pili kēia ʻano hana i nā paepae pololei kiʻekiʻe a hiki ke ʻike i nā hewa pālahalaha o ≤0.5μm/m². Hoʻohana pinepine ʻia ia i ka ʻike ʻana i nā mīkini photolithography a me nā paepae mīkini ana ʻekolu-coordinate kiʻekiʻe.
Ii. Ke ʻano hana hoʻonohonoho pae uila
He maʻalahi ka hoʻohana ʻana i ka ʻike ʻana i ka pae uila a he kūpono loa hoʻi. Ua koho ʻia a hoʻonohonoho ʻia ka pae uila TESA A2 (me ka hoʻonā o 0.01μm/m) i loko o kahi ʻāpana 9 × 9 ma ke kuhikuhi axis X / Y o ke kahua. Ma ka hōʻiliʻili like ʻana i ka ʻikepili inclination o kēlā me kēia pae a laila e hoʻohana i ke ʻano liʻiliʻi loa no ka helu ʻana, hiki ke loaʻa pololei ka waiwai flatness. Hiki i kēia ʻano hana ke ʻike pono i nā kūlana concavity kūloko a me ka convexity o ke kahua. No ka laʻana, hiki ke ʻike ʻia kahi fluctuation o 0.2μm i loko o kahi pae 50mm, kahi kūpono no ka ʻike wikiwiki ʻana i ka hana nui.
Iii. Ke ʻano hana aniani pālahalaha Optical
He kūpono ke ʻano kristal pālahalaha optical no ka ʻike ʻana i nā kahua liʻiliʻi. E hoʻopili pono i ka kristal pālahalaha optical i ka ʻili e hoʻāʻo ʻia ma ke kahua a nānā i nā palena hoʻopilikia i hana ʻia ma waena o lākou ma lalo o ka hoʻomālamalama ʻana o kahi kumu kukui monochromatic (e like me ke kukui sodium). Inā he mau kaha pololei like nā kaha, hōʻike ia i ka pālahalaha maikaʻi. Inā ʻike ʻia nā kaha piʻo, e helu i ka hewa pālahalaha ma muli o ke kekelē o ke kūlou kaha. Hōʻike kēlā me kēia kaha piʻo i kahi ʻokoʻa kiʻekiʻe o 0.316μm, a hiki ke loaʻa ka ʻikepili pālahalaha ma o ka hoʻololi maʻalahi.
ʻEhā. Mīkini ana ʻekolu-hoʻonohonoho ʻano nānā
Hiki i ka mīkini ana ʻekolu-hoʻonohonoho ke hoʻokō i ke ana pololei kiʻekiʻe ma kahi ʻekolu-dimensional. E kau i ka paepae granite ma ka papa hana o ka mīkini ana a hoʻohana i ka probe e hōʻiliʻili like i ka ʻikepili mai nā wahi ana he nui ma ka ʻili o ka paepae. Hoʻoponopono a kālailai ka ʻōnaehana mīkini ana i kēia mau ʻikepili e hana i kahi hōʻike pālahalaha o ka paepae. ʻAʻole hiki i kēia ʻano hana ke ʻike wale i ka pālahalaha, akā loaʻa pū kekahi mau palena geometric ʻē aʻe o ka paepae i ka manawa like, a kūpono no ka ʻike piha ʻana i nā paepae granite nui.
ʻO ka hoʻokele ʻana i kēia mau ʻano ʻike e hiki ke kōkua iā ʻoe e loiloi pololei i ka pālahalaha o ka paepae kikoʻī granite a hāʻawi i kahi hōʻoia hilinaʻi no ka hana paʻa o nā lako kikoʻī.