Kōkua nā ʻāpana Granite i ka XYZT precision gantry movement platform e hōʻoia i ka pololei o ka hana semiconductor.

I loko o ka hale hana semiconductor, ʻoi aku ka nui o nā koi o ke kaʻina hana chip no nā kūlana kaiapuni a me ka pololei o nā mea hana, a hiki i kahi haʻahaʻa liʻiliʻi ke alakaʻi i kahi emi nui o ka hua chip. ʻO ka XYZT precision gantry movement platform e hilinaʻi ana i nā ʻāpana granite e hui pū me nā ʻāpana ʻē aʻe o ke kahua e kūkulu i kumu paʻa no ka hoʻokō ʻana i ka pololei nanoscale.
ʻOi aku ka maikaʻi o ka haʻalulu haʻalulu
I loko o ka hale hana semiconductor, hiki i ka hana o nā mea hana peripheral a me nā limahana e hele ana a puni ka haʻalulu. ʻO ke ʻano o loko o nā ʻāpana granite he ʻeleʻele a ʻaʻahu, me nā hiʻohiʻona kūlohelohe kiʻekiʻe, e like me ka "barrier" maikaʻi. Ke hoʻouna ʻia ka haʻalulu o waho i ka paepae XYZT, hiki i ka mea granite ke hoʻemi pono ma mua o 80% o ka ikehu haʻalulu a hoʻemi i ka hoʻopili ʻana o ka haʻalulu ma ka pololei o ka neʻe ʻana. I ka manawa like, ua hoʻolako ʻia ka paepae me kahi ʻōnaehana alakaʻi ea lana kiʻekiʻe, e hana pū ana me nā mea granite. Hoʻohana ke alakaʻi lele lele i ke kiʻi ʻoniʻoni paʻa i hana ʻia e ke kinoea puʻe kiʻekiʻe e ʻike ai i ka neʻe ʻana o ka hoʻokuʻu ʻole ʻia o nā ʻāpana neʻe o ka paepae a hoʻemi i ka haʻalulu liʻiliʻi i hoʻokumu ʻia e ka mīkini friction. Hoʻohui pū ʻia nā mea ʻelua e mālama mau ʻia ka pololei o ka hoʻonohonoho ʻana i ka pae nanometer i nā kaʻina hana nui e like me ka lithography chip a me ka etching, a pale i ka hoʻokaʻawale ʻana o nā hiʻohiʻona kaapuni chip i hana ʻia e ka vibration.
Paʻa wela maikaʻi
ʻO ka loli o ka mahana a me ka haʻahaʻa i loko o ka hale hana he mana nui i ka pololei o nā lako hana chip. He haʻahaʻa loa ka helu hoʻonui wela o ka granite, maʻamau ma 5-7 × 10⁻⁶/℃, ʻaneʻane loli ka nui i ka wā e loli ai ka mahana. ʻOiai ʻo ka ʻokoʻa o ka mahana ma waena o ke ao a me ka pō i loko o ka hale hana a i ʻole ka hana wela o nā mea hana e hoʻololi i ka mahana ambient, hiki ke kūpaʻa nā ʻāpana granite i mea e pale ai i ka deformation o ka paepae ma muli o ka hoʻonui ʻana a me ka hoʻemi ʻana. I ka manawa like, ʻo ka ʻōnaehana hoʻonaʻauao akamai i hoʻolako ʻia me ka paepae e nānā i ka mahana ambient i ka manawa maoli, hoʻoponopono ʻokoʻa i ka ea a me nā mea hoʻoheheʻe wela, a mālama i ka mahana hana ma 20 ° C ± 1 ° C. Hoʻohui pū ʻia me nā pono o ka paʻa wela granite, e hōʻoia i ka pae i ka hana lōʻihi, ʻo ka neʻe ʻana o kēlā me kēia axis e hōʻoia mau i ka nui o ka chip i kēlā me kēia axis. pololei, ua like ka hohonu o ka etching.
E hoʻokō i nā pono o ke kaiapuni maʻemaʻe
Pono ka hale kūʻai semiconductor e mālama i kahi kiʻekiʻe o ka maʻemaʻe e pale i nā ʻāpana lepo mai ka hoʻohaumia ʻana i ka chip. ʻAʻole hoʻopuka ka mea Granite i ka lepo, a maʻalahi ka ʻili, ʻaʻole maʻalahi ke komo i ka lepo. Hoʻohana ka paepae holoʻokoʻa i kahi hoʻolālā paʻa piha a semi-pani ʻia paha e hōʻemi i ke komo ʻana o ka lepo o waho. Hoʻopili ʻia ka ʻōnaehana ea o loko me ka ʻōnaehana ea maʻemaʻe o ka hale hana e hōʻoia i ka hoʻomaʻemaʻe ʻana o ka ea o loko i ke kiʻekiʻe i koi ʻia e ka hana chip. I loko o kēia kaiapuni maʻemaʻe, ʻaʻole e hoʻopilikia nā mea granite i ka hana ma muli o ka lepo lepo, a me nā mea nui e like me nā sensor kiʻekiʻe a me nā motika o ka paepae hiki ke hana paʻa, e hāʻawi ana i ka hōʻoia pololei nanoscale mau a hilinaʻi no ka hana chip, a kōkua i ka ʻoihana semiconductor e neʻe i kahi pae kiʻekiʻe.