Ma ke kahua o ka semiconductor wafer inspection, pili pono ka maʻemaʻe o ka lumi lumi maʻemaʻe i ka hua huahana. Ke hoʻomau nei ka hoʻomaikaʻi ʻana o nā kaʻina hana chip, nā koi no ka lawe ʻana i nā paepae o nā mea ʻike maka ke piʻi nui nei. ʻO nā paepae Granite, me kā lākou mau hiʻohiʻona o ka hoʻokuʻu ʻana i ka ion metala a me ka haumia haʻahaʻa haʻahaʻa, ua ʻoi aku ma mua o nā mea kila kila kuʻuna a lilo i mea hoʻonā maikaʻi loa no nā lako nānā wafer.
ʻO ka Granite he pōhaku igneous maoli i haku ʻia me nā minela non-metallic e like me ka quartz, feldspar a me ka mica. Hāʻawi kēia ʻano i ka pono o ka hoʻokuʻu ʻana i nā ion metala ʻole. I ka hoʻohālikelike ʻana, ʻo ke kila kila, ma ke ʻano he huila o nā metala e like me ka hao, chromium a me nickel, hiki ke hoʻoheheʻe ʻia i ka electrochemical corrosion ma kona ʻili ma muli o ka hoʻoheheʻe ʻia o ka wai a me nā kinoea acidic a i ʻole alkaline i loko o kahi lumi maʻemaʻe, e hopena i ka ua o nā ion metala e like me Fe²⁺ a me Cr³⁺. I ka manawa e hoʻopili ai kēia mau iona liʻiliʻi i ka ʻili o ka wafer, e hoʻololi lākou i nā waiwai uila o ka mea semiconductor i nā kaʻina hana e like me ka photolithography a me ka etching, e hoʻoneʻe ai i ka paepae uila o ka transistor, a hiki i ke alakaʻi ʻana i nā pōkole pōkole i ke kaapuni. Hōʻike ka ʻikepili hoʻāʻo ʻoihana ʻoihana ma hope o ka hōʻike mau ʻana o ka paepae granite i kahi lumi maʻemaʻe i hoʻohālikelike ʻia a me kahi ʻano haʻahaʻa (23±0.5℃, 45%±5% RH) no 1000 mau hola, ʻoi aku ka haʻahaʻa o ka hoʻokuʻu ʻana o nā ion metala ma mua o ka palena ʻike (<0.1ppb). Hiki ke kiʻekiʻe i ka 15% a i ka 20% ka nui o ka hemahema o nā wafers i hoʻopili ʻia e ka ion metala i ka wā e hoʻohana ai i nā paepae kila kila.
Ma ke ʻano o ka hoʻomalu ʻana i ka palaka, hana maikaʻi loa nā paepae granite. Loaʻa i nā lumi hoʻomaʻemaʻe nā koi kiʻekiʻe no ka neʻe ʻana o nā ʻāpana i hoʻokuʻu ʻia i ka lewa. No ka laʻana, ma ISO Class 1 lumi hoʻomaʻemaʻe, ʻaʻole ʻoi aku ka nui o nā ʻāpana 0.1μm i ʻae ʻia i kēlā me kēia mika cubic ma mua o 10. ʻOiai inā ua hoʻomaʻamaʻa ʻia ke kahua kila kila, hiki ke hana i nā ʻōpala metala a i ʻole nā mea ʻokiʻoki i ka ʻili ʻana ma muli o nā ikaika o waho e like me ka vibration lako a me ka hana o nā limahana, hiki ke hoʻopilikia i ke ala optical detection a i ʻole e ʻoki i ka ʻili o ka waʻa. ʻO nā paepae Granite, me ko lākou ʻano mineral paʻakikī (density ≥2.7g/cm³) a me ka paʻakikī kiʻekiʻe (6-7 ma ka pālākiō Mohs), ʻaʻole hiki ke komo a haki paha i ka wā lōʻihi. Hōʻike nā ana ana i hiki iā lākou ke hoʻemi i ka neʻe ʻana o nā ʻāpana i hoʻokuʻu ʻia i ka lewa o ka ʻāpana mea ʻike ma mua o 40% i hoʻohālikelike ʻia me nā paepae kila kila, e mālama pono ana i nā kūlana papa maʻemaʻe.
Ma waho aʻe o kāna mau hiʻohiʻona maʻemaʻe, ʻoi aku ka maikaʻi o ka hana piha o nā paepae granite ma mua o ke kila kila. Ma ke ʻano o ka paʻa wela, ʻo kona coefficient o ka hoʻonui wela he (4-8) × 10⁻⁶/℃ wale nō, ʻoi aku ma mua o ka hapalua o ke kila kila (e pili ana i 17 × 10⁻⁶/℃), hiki ke mālama i ka pololei o ka hoʻonohonoho ʻana o nā mea ʻike i ka wā e loli ai ka mahana o ka lumi maʻemaʻe. ʻO ke ʻano o ka damping kiʻekiʻe (damping ratio> 0.05) hiki ke hoʻopau koke i ka haʻalulu o nā mea hana a pale aku i ka haʻalulu ʻike. ʻO kona kūpaʻa ʻino maoli e hiki ai iā ia ke paʻa paʻa ʻoiai ke ʻike ʻia i nā solvents photoresist, nā kinoea etching a me nā kemika ʻē aʻe me ka ʻole o ka pono o ka pale uhi hou.
I kēia manawa, hoʻohana nui ʻia nā paepae granite i nā mea kanu wafer holomua. Hōʻike ka ʻikepili ma hope o ka hoʻohana ʻana i ka paepae granite, ua emi ka helu kuhi hewa o ka ʻike ʻana i ka ʻāpana wafer surface e 60%, ua hoʻonui ʻia ka pōʻaiapili calibration i ʻekolu mau manawa, a ua hāʻule ke kumukūʻai holoʻokoʻa e 25%. Ke neʻe nei ka ʻoihana semiconductor i ka pololei kiʻekiʻe, ʻo nā paepae granite, me kā lākou mau mea pono nui e like me ka hoʻokuʻu ʻana i ka ion metal zero a me ka pollution particle haʻahaʻa, e hoʻomau i ke kākoʻo kūpaʻa a hilinaʻi no ka nānā ʻana i ka wafer, e lilo i mea ikaika e alakaʻi i ka holomua o ka ʻoihana.
Ka manawa hoʻouna: Mei-20-2025