Ma ke kahua o ka nānā ʻana i ka wafer semiconductor, pili pono ka maʻemaʻe o ke kaiapuni lumi maʻemaʻe i ka hua huahana. Ke hoʻomau nei ka pololei o nā kaʻina hana hana chip i ka hoʻomaikaʻi ʻana, ke lilo nei nā koi no nā kahua lawe o nā lako ʻike i mea paʻakikī. ʻO nā kahua Granite, me ko lākou mau ʻano o ka hoʻokuʻu ʻana o ka ion metala ʻole a me ka haumia haʻahaʻa o nā ʻāpana, ua ʻoi aku ma mua o nā mea kila kila kuʻuna a lilo i mea makemake nui ʻia no nā lako nānā wafer.
He pōhaku igneous kūlohelohe ka Granite i haku ʻia me nā minelala ʻaʻole metala e like me ka quartz, feldspar a me ka mica. Hāʻawi kēia ʻano iā ia i ka pono o ka hoʻokuʻu ʻana o ka ion metala ʻole. I ka hoʻohālikelike ʻana, ʻo ke kila kila, ma ke ʻano he hui metala e like me ka hao, chromium a me ka nickel, he mea maʻalahi ia i ka corrosion electrochemical ma kona ʻili ma muli o ka ʻino ʻana o ka mahu wai a me nā kinoea acidic a alkaline paha i loko o kahi lumi maʻemaʻe, e hopena ana i ka ua ʻana o nā ion metala e like me Fe²⁺ a me Cr³⁺. Ke hoʻopili kēia mau ion liʻiliʻi i ka ʻili o ka wafer, e hoʻololi lākou i nā waiwai uila o ka mea semiconductor i nā kaʻina hana ma hope e like me ka photolithography a me ke etching, e hana i ka drift voltage paepae o ka transistor, a hiki ke alakaʻi i nā kaapuni pōkole i loko o ke kaapuni. Hōʻike ka ʻikepili hoʻāʻo ʻoihana ʻoihana ma hope o ka hoʻomau ʻia ʻana o ka paepae granite i kahi lumi maʻemaʻe a me ke kaiapuni haʻahaʻa (23 ± 0.5 ℃, 45% ± 5% RH) no 1000 mau hola, ʻoi aku ka haʻahaʻa o ka hoʻokuʻu ʻana o nā ion metala ma mua o ka palena ʻike (< 0.1ppb). ʻO ka nui o nā hemahema o nā wafers i hoʻokumu ʻia e ka haumia ʻana o ka ion metala i ka wā e hoʻohana ai i nā kahua kila kila hiki ke kiʻekiʻe i 15% a 20%.
Ma ke ʻano o ka kaohi ʻana i ka haumia o nā ʻāpana, hana maikaʻi loa nā kahua granite. Loaʻa i nā lumi maʻemaʻe nā koi kiʻekiʻe loa no ka hoʻohuihui ʻana o nā ʻāpana i hoʻokuʻu ʻia i ka lewa. No ka laʻana, ma nā lumi maʻemaʻe ISO Class 1, ʻaʻole iʻoi aku ka nui o nā ʻāpana 0.1μm i ʻae ʻia no ka mika cubic ma mua o 10. ʻOiai inā ua hana ʻia ka hana polishing i ke kahua kila kila, hiki nō iā ia ke hana i nā ʻōpala metala a i ʻole ka unahi oxide e ʻili ana ma muli o nā mana o waho e like me ka haʻalulu o nā lako a me ka hana o nā limahana, hiki ke hoʻopilikia i ke ala optical ʻike a i ʻole ke kahakaha ʻana i ka ʻili o ka wafer. ʻO nā kahua Granite, me ko lākou ʻano mineral paʻa (density ≥2.7g/cm³) a me ka paʻakikī kiʻekiʻe (6-7 ma ka unahi Mohs), ʻaʻole lākou e maʻalahi i ka ʻaʻahu a haki paha i ka wā hoʻohana lōʻihi. Hōʻike nā ana i ana ʻia hiki iā lākou ke hōʻemi i ka hoʻohuihui ʻana o nā ʻāpana i hoʻokuʻu ʻia i ka lewa o ka wahi lako ʻike ma mua o 40% i hoʻohālikelike ʻia me nā kahua kila kila, e mālama pono ana i nā kūlana papa lumi maʻemaʻe.
Ma waho aʻe o kona mau ʻano maʻemaʻe, ʻoi aku ka maikaʻi o ka hana piha o nā kahua granite ma mua o ke kila kila. Ma ke ʻano o ke kūpaʻa wela, ʻo kona coefficient o ka hoʻonui wela he (4-8) ×10⁻⁶/℃ wale nō, ʻoi aku ka liʻiliʻi ma mua o ke kila kila (ma kahi o 17 × 10⁻⁶/℃), hiki ke mālama maikaʻi i ka pololei o ke kūlana o nā lako ʻike i ka wā e loli ai ka mahana i loko o ka lumi maʻemaʻe. ʻO ke ʻano damping kiʻekiʻe (damping ratio > 0.05) hiki ke hoʻēmi koke i ka haʻalulu o nā lako a pale i ka probe ʻike mai ka haʻalulu. ʻO kona kūpaʻa kūlohelohe i ka palaho e hiki ai iā ia ke noho paʻa ʻoiai ke hōʻike ʻia i nā solvents photoresist, nā kinoea etching a me nā kemika ʻē aʻe me ka ʻole o ka pono no ka pale uhi hou aku.
I kēia manawa, hoʻohana nui ʻia nā kahua granite i nā hale hana hana wafer holomua. Hōʻike ka ʻikepili ma hope o ka hoʻohana ʻana i ka paepae granite, ua emi ka helu kuhi hewa o ka ʻike ʻana i nā ʻāpana wafer ma 60%, ua hoʻolōʻihi ʻia ke kaʻina hana calibration i ʻekolu manawa, a ua emi ke kumukūʻai hana holoʻokoʻa ma 25%. I ka neʻe ʻana o ka ʻoihana semiconductor i ka pololei kiʻekiʻe, ʻo nā kahua granite, me kā lākou mau pono koʻikoʻi e like me ka hoʻokuʻu ʻana o ka ion metala ʻole a me ka haumia haʻahaʻa o nā ʻāpana, e hoʻomau i ka hāʻawi ʻana i ke kākoʻo paʻa a hilinaʻi no ka nānā ʻana i ka wafer, e lilo i mea nui e hoʻokele ai i ka holomua o ka ʻoihana.
Ka manawa hoʻouna: Mei-20-2025