Pehea e hōʻoia ai ka base granite (ZHHIMG®) i ka loaʻa ʻana o nā lako semiconductor i ka pae sub-micron?

Ma ke kahua o ka hana semiconductor, ʻo ka sub-micron precision ke kī i ka hōʻoia ʻana i ka hana chip, a ʻo ke kumu granite (ZHHIMG®), me kāna mau waiwai waiwai, ka hoʻoponopono pololei a me ka hoʻolālā hou, ua lilo ia i kumu kumu no ka hoʻokō ʻana i kēia pololei.

Mai ka hiʻohiʻona o nā waiwai waiwai, ʻo ka granite ʻeleʻele i koho ʻia e ZHHIMG® he ʻano nui ma kahi o 3100kg/m³, me kahi ʻano o loko. Hāʻawi kēia kiʻekiʻe kiʻekiʻe iā ia me ke kūpaʻa a me ka rigidity. I ka wā o ka hana ʻana o nā lako semiconductor, ʻo ka hoʻololi ʻana o nā kaʻa a me ka neʻe ʻana o nā ʻāpana mechanical i loko o nā mea hana e hoʻoulu ai i nā haʻalulu. Hiki i ke kumu granite ke komo pono ma luna o 90% o ka ikehu vibration, e hōʻemi nui i ka hopena o ka haʻalulu i ka pololei o nā mea hana. Eia nō naʻe, ʻo kāna coefficient haʻahaʻa haʻahaʻa o ka hoʻonui wela e hiki ai iā ia ke mālama i kona deformation i loko o kahi liʻiliʻi liʻiliʻi i ka wā e piʻi ai ka mahana ambient, e hāʻawi ana i kahi kumu kākoʻo paʻa no nā lako semiconductor a pale i ka neʻe ʻana o nā mea lako ma muli o nā loli wela, hiki ke hoʻopilikia i ka pololei.

Ma ke ʻano o ka hana ʻana a me ka hana ʻana, hoʻohana ka hale hana ZHHIMG® i nā lako hana hoʻomohala honua a loaʻa iā ia nā mīkini wili nui ʻehā (ʻoi aku ke kumukūʻai o kēlā me kēia mīkini ma mua o 500,000usd), hiki ke hana i ka wili kiʻekiʻe ma ka granite. Ma o ka lima-axis linkage CNC machining a me nā kaʻina hana ʻē aʻe, hiki i ka palahalaha o ka waihona mīkini ke hiki i ke kiʻekiʻe nanometer, e hāʻawi ana i kahi papa kuhikuhi ultra-flat no ka hoʻokomo ʻana i nā lako semiconductor a me ka hōʻoia i ka hoʻonohonoho pololei ʻana o kēlā me kēia ʻāpana o nā mea hana. Eia kekahi, ʻo ka hale hana mahana a me ka haʻahaʻa (e uhi ana i kahi ʻāpana o 10,000 square meters) e hāʻawi i kahi ʻano paʻa no ka hana. ʻO ka 500mm ākea a me ka 2000mm hohonu anti-vibration auwaha a puni, a me nā cranes leo ʻole, hoʻokaʻawale maikaʻi i ka hoʻopili ʻana i waho a hōʻoia i ka pololei o ka hana ʻana o ka waihona mīkini.

Eia kekahi, loaʻa iā ZHHIMG® kahi mana hana maʻamau. No nā koi kūikawā o nā lako semiconductor, hiki ke hana mua ʻia nā lua hoʻonohonoho pololei a me nā pā kelepona e hoʻokō i ka hoʻohālikelike kūpono ma waena o nā mea hana a me ke kumu. I ka manawa like, i ka hui pū ʻana me ka honua-class metrology a me nā mea hoʻāʻo e like me ka German Mahr minute gauge (me ka pololei o 0.5um) a me ka pae uila Swiss WYLER, ua nānā pono ʻia ka waihona mīkini a hoʻopaʻa ʻia e hōʻoia e hiki i kēlā me kēia mīkini mīkini ke hoʻokō i nā koi koʻikoʻi o nā lako semiconductor no ka pololei pae sub-micron.

ʻO ka hui pū ʻana o kēia mau mea maikaʻi e hoʻolilo i ka ZHHIMG® granite base i koho hilinaʻi no ka loaʻa ʻana o ka sub-micron precision i nā lako semiconductor, e kōkua ana i ka hana semiconductor e neʻe i nā māla kiʻekiʻe.