I nā polokalamu semiconductor, ʻo wai nā subsystem kumu i hoʻohana nui ʻia i ka granite?

ʻO Granite kekahi o nā mea kaulana loa i hoʻohana ʻia i nā mea semiconductor. He ʻano pōhaku ʻoʻoleʻa a me nā ʻano ʻano like ʻole o ka hina, ʻulaʻula, a me ke keʻokeʻo. ʻIke ʻia ʻo Granite no kona lōʻihi, haʻahaʻa haʻahaʻa hoʻonui hoʻonui, a me ka maikaʻi o ka thermal conductivity, e lilo ia i mea kūpono no ka hoʻohana ʻana i nā subsystems semiconductor device.

ʻO kekahi o nā subsystems mua e hoʻohana ana i ka granite i nā mea semiconductor ʻo ia ka wafer handling a me ka hoʻoponopono subsystem. He kuleana koʻikoʻi kēia subsystem i ka hana hana o nā mea semiconductor. ʻO ka wafer ka substrate hoʻomaka no ka hāmeʻa, a ʻo ka lawelawe ʻana a me ka hoʻoponopono subsystem ke kuleana no ka hoʻoili ʻana i nā wafers ma waena o nā keʻena like ʻole a me nā lako hana. Hoʻohana ʻia ʻo Granite no ka hana ʻana i nā papa hana wafer pololei loa a hāʻawi i kahi kahua paʻa no ka hana wafer.

ʻO kekahi subsystem koʻikoʻi e hoʻohana ana i ka granite ʻo ia ka subsystem vacuum. I nā ʻenehana semiconductor, hoʻohana ʻia nā keʻena vacuum e pale aku i ka ʻino i ka wā hana. No ka hana maikaʻi ʻana o kēia ʻōnaehana, pono e hoʻopaʻa ʻia ke keʻena, kahi e komo ai ka granite. Hoʻohui, hiki i ka granite ke kiʻekiʻe machining precision no ka hana ʻana i kahi sila maikaʻi loa, e hāʻawi ana i kahi ʻenekona pono no ka hana wafer.

ʻO ka subsystem alignment kekahi ʻōnaehana koʻikoʻi e hoʻohana ai i nā waiwai kūʻokoʻa o ka granite. ʻO kēia subsystem ke kuleana no ka hoʻopili ʻana i nā ʻāpana like ʻole o nā mea semiconductor me ka pololei a me ka pololei. Hoʻohana ʻia ka Granite i ka hoʻolālā a me ke kūkulu ʻana i nā pae alignment e hōʻoia i ka rigidity kiʻekiʻe a me ka paʻa. ʻO ka ʻoʻoleʻa kiʻekiʻe o ka granite e kōkua i ka hoʻokō ʻana i ka pololei alignment kiʻekiʻe, e alakaʻi ana i ka hana ʻana i nā mea semiconductor kūpono loa a hilinaʻi.

ʻO ka hope, ʻo ka subsystem metrology kahi ʻōnaehana o nā mea semiconductor e hoʻohana ana i ka granite. He kuleana koʻikoʻi ka Metrology i ka hana wafer, a he mea koʻikoʻi ka pololei o kēia subsystem i ka hōʻoia ʻana i ka maikaʻi o ka hāmeʻa. Hāʻawi ʻo Granite i kahi kahua paʻa a ʻoʻoleʻa e kōkua i ka hōʻemi ʻana i nā haʻalulu a me ka hōʻemi ʻana i ka hopena o nā loli wela. ʻO kēia, ma ke ʻano, kōkua i ka hoʻokō ʻana i nā ana kūpono loa i ka subsystem metrology, e alakaʻi ana i ka hana ʻana i nā mea semiconductor kiʻekiʻe.

I ka hopena, he mea koʻikoʻi ka granite i ka hana ʻana i nā mea semiconductor. ʻO ia nā waiwai kūʻokoʻa e like me ka rigidity kiʻekiʻe, ka hoʻonui haʻahaʻa wela, a me ka conductivity thermal maikaʻi loa e lilo ia i mea maikaʻi loa no nā subsystems i nā mea semiconductor, me ka lawelawe ʻana a me ka hana ʻana i ka wafer, subsystem vacuum, subsystem alignment, a me subsystem metrology. Eia kekahi, ua kōkua ka hoʻohana ʻana i ka granite i nā mea semiconductor i ka hana ʻana i nā mea kikoʻī loa, hilinaʻi a maikaʻi hoʻi i hoʻololi i nā ʻoihana he nui.