He mea nui ka moena Granite i nā mea hana semiconductor like ʻole. Ma ke ʻano he mea paʻa loa a paʻa hoʻi, hoʻohana nui ʻia ka granite ma ke ʻano he kumu no nā lako hana semiconductor. Hōʻike ʻia ia e kona coefficient hoʻonui wela haʻahaʻa, kūpaʻa kiʻekiʻe, a me nā waiwai mechanical maikaʻi loa. Ma muli o kēia mau waiwai, hoʻohana pinepine ʻia ka moena granite i ʻekolu ʻano like ʻole o nā mea hana semiconductor - nā lako metrology, nā lako lithography, a me nā lako nānā.
Hoʻohana ʻia nā lako Metrology e ana a ʻike i nā ana koʻikoʻi o nā mea hana semiconductor. He kuleana koʻikoʻi kona i ka mālama ʻana i ka maikaʻi a me ke kūlike o ke kaʻina hana semiconductor. Hoʻokomo pū ʻia nā lako Metrology i nā mea hana e like me nā microscope optical, nā microscope electron, a me nā microscope atomic force (AFM). ʻOiai ʻo ka hana o kēia mau mea ana e pili ana i ko lākou kūpaʻa, ka pololei, a me ke kūʻē ʻana i ka haʻalulu, ʻo ka granite ke koho kūpono no kā lākou mea moe. ʻO ke kūlike a me ke kūpaʻa o ka moena granite e hāʻawi i kahi kahua paʻa no nā mea hana, e hoʻonui ana i ko lākou pololei a me ka hilinaʻi.
Hoʻohana ʻia nā lako hana Lithography e hana i nā ʻano microchip ma ka wafer. Pono ke kaʻina hana lithography i kahi kiʻekiʻe o ka pololei a me ka pololei e hana i nā kaapuni paʻakikī a hoʻomaikaʻi i ka hana chip. Loaʻa i nā lako hana lithography nā ʻōnaehana stepper a me nā scanner e hoʻohana ana i ka mālamalama e hoʻoili i nā kiʻi ma luna o ka wafer. Ma muli o ke ʻano koʻikoʻi o ke kaʻina hana lithography i ka haʻalulu a me nā loli wela, he mea nui kahi moena kiʻekiʻe e hōʻoia i ke kūpaʻa a me ka hana hou ʻana o ke kaʻina hana lithography. Hāʻawi nā moena Granite i ke kūpaʻa e pono ai a me ka hana damping haʻalulu koʻikoʻi no nā ʻōnaehana lithography. ʻAe ka moena granite i ka ʻōnaehana stepper a i ʻole scanner e mālama i nā pilina spatial pololei e hōʻoia ana i ka pololei kiʻekiʻe a me ka maikaʻi o ka huahana hope loa.
Hoʻohana ʻia nā lako nānā e ʻike i nā hemahema i nā mea hana semiconductor. Hoʻokomo pū ʻia nā lako nānā i nā ʻōnaehana e like me nā microscope scan laser, nā microscope electron, a me nā microscope optical. Me ka pono o kēia mau mea hana e pololei loa, paʻa a kū i ka haʻalulu, ʻo nā moena granite ka mea kūpono loa. Kōkua nā waiwai mechanical a me ke kūpaʻa dimensional o Granite i ka hoʻokaʻawale haʻalulu, kahi e hoʻonui ai i ka pololei o ka hopena o nā lako nānā.
I ka hopena, he mea koʻikoʻi ka moena granite i ka ʻoihana semiconductor a hoʻohana nui ʻia i nā ʻano lako like ʻole. ʻO kona mau waiwai kū hoʻokahi e like me ke kūpaʻa dimensional, ka coefficient hoʻonui wela haʻahaʻa, a me ke kūpaʻa mechanical maikaʻi loa e hoʻolilo i ka granite i koho kūpono no ka mea moena o nā lako semiconductor. ʻOiai ʻo ka moena granite kiʻekiʻe e hāʻawi i ke kūpaʻa e pono ai, ka pololei, a me ke kū'ē ʻana i ka haʻalulu i nā lako semiconductor, hoʻomaikaʻi hope ia i ka maikaʻi o ka huahana hope loa. No laila, ʻo ka hoʻohana ʻana i ka moena granite i nā lako semiconductor e hoʻomau mau no nā makahiki e hiki mai ana.
Ka manawa hoʻouna: ʻApelila-03-2024
