ʻO ka maikaʻi o ke koho ʻana i ka base granite no ka papa hoʻāʻo wafer semiconductor.

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I ka ʻoihana semiconductor, ʻo ka nānā ʻana i ka wafer kahi loulou nui e hōʻoia ai i ka maikaʻi a me ka hana o ka chip, a ʻo ka pololei a me ka paʻa o ka papa nānā ʻana he mea koʻikoʻi i nā hopena ʻike. ʻO ka waihona Granite me kāna mau hiʻohiʻona kūʻokoʻa, e lilo i koho maikaʻi loa no ka papaʻaina nānā semiconductor wafer, ʻo ia ka mea mai ka loiloi multi-dimensional no ʻoe. ʻ

ʻO ka mea mua, ʻo ka anana hōʻoia pololei
1. ʻO ka palahalaha kiʻekiʻe a me ka pololei: Hoʻopili ʻia ke kumu granite e ka ʻenehana hana kiʻekiʻe, a hiki i ka palahalaha ke hiki i ± 0.001mm / m a i ʻole ke kiʻekiʻe o ka pololei, a ʻoi aku ka maikaʻi o ka pololei. Ma ke kaʻina hana nānā wafer, hāʻawi ka mokulele kiʻekiʻe i ke kākoʻo paʻa no ka wafer a hōʻoia i ka pilina pololei ma waena o ka probe o nā mea nānā a me nā hui solder ma ka ʻili wafer. ʻ
2. Haʻahaʻa haʻahaʻa haʻahaʻa o ka hoʻonui wela: ʻo ka hana semiconductor ka mea maʻalahi i nā loli wela, a ʻo ka coefficient o ka hoʻonui wela o ka granite he haʻahaʻa loa, ma kahi o 5 × 10⁻⁶/℃. Ke holo nei ke kahua ʻike, ʻoiai inā e loli ka mahana ambient, ʻano liʻiliʻi ka nui o ke kumu granite. No ka laʻana, ma ka hale hana wela kiʻekiʻe i ke kauwela, hiki i ka wela o ka paepae ʻike kumu metala maʻamau ke hoʻololi i ke kūlana pili o ka wafer a me nā mea ʻike maka, e pili ana i ka pololei o ka ʻike; Hiki i ke kahua ʻike kumu granite ke mālama i ka paʻa, e hōʻoia i ka pololei o ke kūlana pili o ka wafer a me nā mea ʻike i ka wā o ke kaʻina ʻike, a hāʻawi i kahi kūlana paʻa no ka ʻike kiʻekiʻe. ʻ
ʻO ka lua, ke ʻano kūpaʻa
1. ʻO ka hale paʻa a me ke kūpaʻa haʻalulu: Granite ma hope o nā miliona mau makahiki o nā kaʻina geological, ʻo ka ʻano o loko ka paʻa a me ka like. I loko o ke kaiapuni paʻakikī o kahi hale hana semiconductor, ʻo ka haʻalulu i hana ʻia e ka hana ʻana o nā mea hana peripheral a me nā limahana e hele ana a puni e hoʻopau maikaʻi ʻia e ke kumu granite. ʻ
2. Pono ka hoʻohana lōʻihi: ke hoʻohālikelike ʻia me nā mea ʻē aʻe, he kiʻekiʻe ka paʻakikī o ka granite, ke kūpaʻa paʻa ikaika, a hiki i ka paʻakikī Mohs ke hiki i 6-7. ʻAʻole hiki ke hoʻohana maʻalahi ka papa pōhaku i ka wā e hoʻouka pinepine ai, wehe a nānā i nā hana. E like me ka hoʻohana maoli ʻana o ka ʻikepili helu, ka hoʻohana ʻana i ka papa hoʻāʻo kumu granite, ka hana mau ma hope o 5000 mau hola, hiki ke mālama ʻia ka palahalaha a me ka pololei pololei ma mua o 98% o ka pololei mua, e hōʻemi ana i nā mea hana ma muli o ka hoʻohana ʻana i ke kumu kumu e ka calibration maʻamau a me nā manawa mālama, e hōʻemi i nā kumukūʻai hana ʻoihana, e hōʻoia i ka paʻa lōʻihi o ka hana hoʻāʻo. ʻ

ʻO ke kolu, maʻemaʻe a anti-interference ana
1. Haʻahaʻa lepo hanauna: ka semiconductor manufacturing kaiapuni e pono e maʻemaʻe loa, a me ka granite mea pono'ī paʻa a 'aʻole maʻalahi e hana i ka lepo particles. I ka wā o ka hana ʻana o ke kahua hoʻāʻo, pale ʻia ka lepo i hana ʻia e ke kumu e hoʻohaumia i ka wafer, a ua hoʻemi ʻia ka pilikia o ka pōkole pōkole a me ke kaapuni ākea i hoʻokumu ʻia e nā ʻāpana lepo. Ma ka wafer inspection area o ka lepo-free workshop, e hoomalu mau ia ana ka lepo a puni ka granite base inspection table i kahi haahaa loa, e halawai ana me na koi maemae o ka oihana semiconductor. ʻ
2. ʻAʻohe mea hoʻopili magnetic: pili ka mea ʻike i ke kaiapuni electromagnetic, a ʻo ka granite he mea non-magnetic, ʻaʻole ia e hoʻopilikia i ka hōʻailona uila o nā mea ʻike. I ka hoʻohana ʻana i ka electron beam detection a me nā ʻenehana hoʻāʻo ʻē aʻe e koi ai i kahi kaiapuni electromagnetic kiʻekiʻe loa, ʻo ke kumu granite e hōʻoia i ka hoʻoili paʻa ʻana o ka hōʻailona uila o nā mea ʻike a hōʻoia i ka pololei o nā hopena hōʻike. No ka laʻana, ke hoʻāʻo ʻia ka wafer no ka hana uila kiʻekiʻe, ʻo ke kumu granite non-magnetic e pale i ka hoʻopilikia ʻana i ka ʻike o kēia manawa a me nā hōʻailona uila, no laila e hōʻike maoli ka ʻikepili ʻike i nā ʻano uila wafer.