Ke komo nei ka ʻoihana semiconductor honua i ka hahai mau ʻana i ka "Angstrom Era," kahi e ana ʻia ai nā ana o ka transistor ma ka laulā o kekahi mau ʻātoma. I ka neʻe ʻana o ka lithography a me nā mea hana nānā i kēia mau unahi microscopic, ua neʻe ke koi no ke kūpaʻa kūkulu mai ka "macro" a i ka "nano." Ma ka puʻuwai o kēia kipi aia kahi mea kahiko e like me ka Honua ponoʻī: Precision Granite.
ʻOiai he nui ka poʻe e manaʻo nei he pōhaku maʻalahi ka granite, i loko o ka pōʻaiapili o kahikahua nanopositioninga i ʻole kahi ʻōnaehana nānā wafer wikiwiki, he keramika ʻenekinia akamai. ʻO ka hoʻomaopopo ʻana i ka ʻokoʻa ma waena o nā mea hana metrology kumu a me nā kahua neʻe holomua he mea nui ia no nā OEM e ʻimi nei e hoʻokuke i nā palena o ka mea hiki ke hana ʻia i ka hana silicon.
Granite CMM vs. Granite Surface Plate: Ke hoʻomaopopo nei i ka hoʻololi ʻenekinia
Ma nā keʻena hoʻokolohua he nui no ka nānā ʻana i ka maikaʻi,Papa ʻIli Granitehe mea paʻa i nā wahi a pau—he kuhikuhi hilinaʻi a pālahalaha no ke ana lima. Eia nō naʻe, aia kahi kuhi hewa maʻamau e hiki ke hoʻololi ʻia kahi papa ʻili a me kahi Granite CMM (Coordinate Measuring Machine). Mai kahi hiʻohiʻona ʻenekinia, hōʻike lākou i ʻelua mau pae like ʻole o ka paʻakikī.
Ua hoʻolālā ʻia kahi papa ʻili no ke kūpaʻa paʻa. ʻO kāna hana nui ka noho pālahalaha ma lalo o kahi ukana paʻa. I ka hoʻohālikelike ʻana, pono i kahi kumu granite no kahi CMM a i ʻole kahi kahua kikoʻī e lawelawe i nā ukana hoʻololi. Ke neʻe nei ke alahaka o kahi CMM a i ʻole kahi motika linear e hoʻolalelale i kahi kahua wafer ma kekahi mau Gs, pono ka granite e kūʻē ʻaʻole wale i ke kūlou ʻana, akā, i ka torsion a me ka harmonic resonance.
Koho kūikawā nā ʻenekinia ZHHIMG i ka "Black Granite" no nā noi ikaika ma muli o kona ʻano kiʻekiʻe a me ke ʻano o ka palaoa maikaʻi. ʻOiai e hoʻohana paha kahi papa ʻili maʻamau i kahi ʻano porous, pono kahi kumu CMM i ka Young's Modulus kiʻekiʻe loa e hōʻoia i ka "snap" o ka neʻe wikiwiki kiʻekiʻe ʻaʻole e unuhi ʻia i loko o ke kani ʻana o ke ʻano e hōʻino ai i ka ʻikepili ana.
Nā Pae Kūpono i ka Hana ʻana o Semiconductor: Ke Kumu o ka Hua
I ka hana ʻana o ka semiconductor, ʻo ka throughput a me ka yield nā ana ʻelua koʻikoʻi loa. Pili pono nā mea ʻelua i ka hana onā pae kikoʻīInā paha he kahua wafer i loko o kahi mīkini lithography DUV/EUV a i ʻole ka ʻōnaehana hoʻonohonoho i loko o kahi mea hana Automated Optical Inspection (AOI), pono ka mea kumu e hoʻomaʻamaʻa i ka hana hou ʻana ma lalo o ka nanometer.
ʻO ka pilikia nui i loko o ka fab ka wela. Hoʻopuka nā motika linear a me nā actuators i ka ikehu wela nui. Inā hana ʻia ke kumu o ke kahua me ka alumini a i ʻole ke kila, ʻo ka hopena o ka hoʻonui wela e hoʻoneʻe i ka wafer mai ke kūlike ʻole, e alakaʻi ana i nā "hewa overlay" e hōʻino ai i nā ʻāpana holoʻokoʻa o nā chips.
ʻO ka coefficient haʻahaʻa loa o ka Granite o ka hoʻonui wela (CTE) e hōʻoiaʻiʻo ana ʻoiai e wela ana nā motika, e mau ana ka "palapala ʻāina" kino o ke kahua. Eia kekahi, hāʻawi ʻo ZHHIMG i nā ʻāpana granite i hoʻopilikino ʻia me nā ala ea i hoʻohui ʻia. Ma muli o ka hiki ke hoʻopili ʻia ka granite i kahi pālahalaha e like me ke aniani, lawelawe ia ma ke ʻano he alo kūpono no nā bearings ea, e ʻae ana i nā kahua e "lana" ma luna o kahi ʻili lahilahi o ka ea me ka ʻole o ka friction a me ka ʻole o ka stiction.
ʻO ke Kino o ke Kumu Pae Nanopositioning
I ko mākou komo ʻana i ke aupuni okahua nanopositioning, ke hana nei mākou me nā neʻe ʻana i ʻoi aku ka liʻiliʻi ma mua o ka lauoho kanaka ma kahi o 10,000. Ma kēia pae, ʻo ka haʻalulu ka ʻenemi. Haʻalulu mau nā papahele ʻoihana maʻamau ma muli o nā ʻōnaehana HVAC, ka hele wāwae, a me nā mīkini kokoke.
Hana ʻo Granite ma ke ʻano he kānana haʻahaʻa nui. Ma muli o kona nuipa kiʻekiʻe a me ka damping kūloko kiʻekiʻe, hoʻopili maoli ia i nā haʻalulu alapine kiʻekiʻe ma mua o ko lākou hiki ʻana i nā mea ʻike koʻikoʻi a i ʻole ka wafer ponoʻī. ʻO kēia "hoʻokaʻawale passive" ke kumu e hilinaʻi ai nā mea hoʻolako lithography alakaʻi o ka honua iā ZHHIMG e hāʻawi i nā kumu paʻa a kaumaha no kā lākou mau pae kūpono i ka vacuum. Hoʻomaʻamaʻa kūikawā ʻia kā mākou granite e hōʻoia i ka ʻole o ka outgassing, e kūpono ai no nā wahi vacuum kiʻekiʻe e pono ai no nā kaʻina hana electron-beam a me EUV.
Ke Lapping a hiki i ka palena: ʻO ka ZHHIMG Principle
ʻO ka hoʻololi ʻana mai kahi poloka pōhaku maka i kahi ʻāpana semiconductor-grade he huakaʻi o ke ahonui nui. ʻOiai ʻo ka wili CNC e hoʻokokoke mai iā mākou, ua hoʻokō ʻia ka papa "Super-Precision" hope loa ma o ka hoʻopaʻa lima ʻana. He kaʻina hana kēia kahi e hoʻohana ai nā loea ZHHIMG i nā kāpili abrasive a me nā neʻe lima e kahi i nā hapa o ka micron i ka manawa hoʻokahi.
No kahikahua nanopositioning, ʻaʻole wale ka palahalaha ke koi; he mea koʻikoʻi like ka parallelism a me ka perpendicularity o nā ʻili alakaʻi. Hoʻohana kā mākou hale hana i nā mea hahai laser a me nā pae uila me nā hoʻonā o 0.1 arc-kekona e hōʻoia i ka pololei o kēlā me kēia axis. Hōʻoia kēia pae o ka hana lima i ka wā e kau ai ka mea kūʻai aku i kā lākou mau motika linear a me nā encoders, ua kokoke ke kumu mechanical i ka "hemolele" e like me ka ʻae ʻana o ka physics.
Ke Hoʻomākaukau nei i ka Fab no ka Wā E Hiki Mai Ana
I ka neʻe ʻana o ka ʻoihana i nā kikowaena 2nm a ma ʻō aku, e hoʻoikaika wale ʻia nā koi no ka maʻemaʻe o nā mea a me ke kūpaʻa o ka dimensional. ʻO ka hoʻohui ʻana o ka granite me nā mea holomua ʻē aʻe—e like me nā alahaka fiber carbon a i ʻole nā chucks vacuum ceramic—ʻo ia ka palena aʻe i ka kaohi neʻe.
Ke kūpaʻa nei ʻo ZHHIMG i ka ʻoi aku ma mua o ka mea hoʻolako wale nō; he hoa hana pū mākou ma ke kaulahao hoʻolako semiconductor honua. Ma ka hāʻawi ʻana i nā kahua paʻa loa e pono ai no ka hanauna e hiki mai ana o nā pae kikoʻī, ke kōkua nei mākou i ke kūkulu ʻana i nā mīkini e kūkulu i ka wā e hiki mai ana.
Ka manawa hoʻouna: Pepeluali-02-2026