He aha nā mea ʻē aʻe no nā ʻāpana granite i nā lako semiconductor? He aha nā pono a me nā hemahema o kēia mau mea ʻē aʻe i hoʻohālikelike ʻia me ka granite?

ʻO Granite kahi mea i hoʻohana pinepine ʻia i ka ʻoihana semiconductor no kona mau waiwai mechanical maikaʻi loa, ke kūpaʻa wela, a me ke koina haʻahaʻa o ka hoʻonui wela. Eia nō naʻe, me ka hoʻonui mau ʻana o ke koi no ka pololei a me ka huahana kiʻekiʻe, ua puka mai nā mea ʻē aʻe ma ke ʻano he mau koho kūpono no ka hana ʻana i nā ʻāpana lako semiconductor. Ma kēia ʻatikala, e ʻimi mākou i kekahi o nā mea ʻē aʻe no nā ʻāpana granite i nā lako semiconductor a hoʻohālikelike i ko lākou mau pono a me nā hemahema.

Nā Mea Hana ʻē aʻe no nā ʻĀpana Granite

1. Nā mea aniani-ceramic

Ua loaʻa i nā mea aniani-ceramic, e like me Zerodur lāua ʻo Cervit, ka hoʻohana nui ʻia ʻana i ka ʻoihana semiconductor ma muli o ko lākou coefficient hoʻonui wela haʻahaʻa, kokoke i ka silicon. No laila, hiki i kēia mau mea ke hāʻawi i ka paʻa wela maikaʻi a me ka pololei i hoʻonui ʻia i ke kaʻina hana semiconductor. ʻO Zerodur, ma ke ʻano kūikawā, he kiʻekiʻe ke ʻano like a me ke kūpaʻa, e kūpono ai no ka hana ʻana i nā lako lithography.

Nā Pōmaikaʻi:

- Ka helu haʻahaʻa o ka hoʻonui wela
- Kiʻekiʻe ke kiko a me ke kūpaʻa
- Kūpono no nā noi wela kiʻekiʻe

Nā hemahema:

- ʻOi aku ke kumukūʻai i hoʻohālikelike ʻia me ka granite
- He palupalu iki, hiki ke hoʻopilikia i ka mīkini a me ka lawelawe ʻana

2. Nā mea hana keramika

ʻO nā mea seramika, e like me ka alumini oxide (Al2O3), silicon carbide (SiC), a me ka silicon nitride (Si3N4), he mau waiwai mechanical maikaʻi loa, ke kūpaʻa wela kiʻekiʻe, a me ke coefficient hoʻonui wela haʻahaʻa. ʻO kēia mau waiwai e kūpono ai nā seramika no nā ʻāpana lako semiconductor e pono ai ke kūpaʻa wela kiʻekiʻe a me ka pololei, e like me nā pae wafer a me nā chucks.

Nā Pōmaikaʻi:

- Ke kūpaʻa wela kiʻekiʻe a me ka ikaika
- Ka helu hoʻonui wela haʻahaʻa
- Ke kūpaʻa kiʻekiʻe o ka ʻaʻahu a me ka inertness kemika

Nā hemahema:

- Hiki ke palupalu a maʻalahi hoʻi i ka nahā ʻana, ʻoiai i ka wā o ka mīkini a me ka lawelawe ʻana
- Hiki i ka mīkini ʻana a me ka poli ʻana i nā keramika ke paʻakikī a hoʻopau manawa.

3. Nā metala

Ua hoʻohana ʻia nā mea hao, e like me ke kila kila a me ka titanium, no kekahi mau ʻāpana lako semiconductor ma muli o ko lākou machinability maikaʻi loa a me ka ikaika kiʻekiʻe. Hoʻohana pinepine ʻia lākou i nā noi kahi i koi ʻole ʻia ai ke kūpaʻa wela kiʻekiʻe, e like me nā ʻāpana keʻena, nā couplings, a me nā feedthroughs.

Nā Pōmaikaʻi:

- Maikaʻi ka mīkini a me ka hiki ke hoʻopili ʻia
- Ikaika kiʻekiʻe a me ka ductility
- Ke kumu kūʻai haʻahaʻa i hoʻohālikelike ʻia me kekahi o nā mea ʻē aʻe

Nā hemahema:

- Ka helu hoʻonui wela kiʻekiʻe
- ʻAʻole kūpono no nā noi wela kiʻekiʻe ma muli o nā pilikia hoʻonui wela
- Hiki ke hoʻopilikia ʻia e ka pala a me ka haumia

Hopena:

I ka hōʻuluʻulu manaʻo, ʻoiai ʻo ka granite kahi koho kaulana no nā ʻāpana lako semiconductor, ua puka mai nā mea ʻē aʻe, kēlā me kēia me nā pono a me nā hemahema kū hoʻokahi. He pololei loa nā mea aniani-ceramic a paʻa akā hiki ke palupalu. He ikaika nā keramika a he kūpaʻa wela maikaʻi loa akā hiki ke palupalu, e hoʻolilo ana iā lākou i mea paʻakikī ke hana. He ʻuʻuku ke kumukūʻai o nā metala, hiki ke mīkini ʻia, a ductile, akā he kiʻekiʻe ko lākou coefficient o ka hoʻonui wela a hiki ke maʻalahi i ka pala a me ka haumia. I ke koho ʻana i nā mea no nā lako semiconductor, he mea nui e noʻonoʻo i nā koi kikoʻī o ka noi a koho i nā mea e kaulike ai ke kumukūʻai, ka hana, a me ka hilinaʻi.