He aha nā mea ʻokoʻa no nā ʻāpana granite i nā lako semiconductor?He aha nā pono a me nā pōʻino o kēia mau mea ʻokoʻa ke hoʻohālikelike ʻia me ka granite?

He mea maʻamau ka Granite i ka ʻoihana semiconductor no kāna mau waiwai mechanical maikaʻi, kūpaʻa wela, a me ka helu haʻahaʻa o ka hoʻonui wela.Eia nō naʻe, me ka piʻi nui ʻana o ka noi no ka ʻoi aku ka pololei a me ka huahana, ua puka mai nā mea ʻē aʻe e like me nā koho kūpono no ka hana ʻana i nā mea hana semiconductor.Ma kēia ʻatikala, e ʻimi mākou i kekahi o nā mea ʻokoʻa no nā ʻāpana granite i nā lako semiconductor a hoʻohālikelike i kā lākou pono a me nā hemahema.

Nā mea ʻokoʻa no nā ʻāpana Granite

1. Mea aniani-seramika

ʻO nā mea aniani-ceramic, e like me Zerodur a me Cervit, ua loaʻa ka hoʻohana ākea i ka ʻoihana semiconductor ma muli o ko lākou haʻahaʻa haʻahaʻa hoʻonui wela, kahi kokoke i ka silicon.No laila, hiki i kēia mau mea ke hāʻawi i ka ʻoi aku ka maikaʻi o ka wela a me ka pololei i hoʻonui ʻia i ke kaʻina hana semiconductor.ʻO Zerodur, ʻo ia hoʻi, he kiʻekiʻe kiʻekiʻe o ka homogeneity a me ke kūpaʻa, kūpono ia no ka hana ʻana i nā lako lithography.

Pono:

- Ka helu haʻahaʻa o ka hoʻonui wela
- Ka pololei a me ka paʻa kiʻekiʻe
- He kūpono no nā noi wela kiʻekiʻe

Nā hemahema:

- ʻOi ke kumu kūʻai kiʻekiʻe ma mua o ka granite
- He palupalu, hiki ke pilikia i ka mīkini a me ka lawelawe ʻana

2. Na seramika

ʻO nā mea seramika, e like me ka alumini oxide (Al2O3), silicon carbide (SiC), a me ka silicon nitride (Si3N4), loaʻa nā waiwai mechanical maikaʻi loa, ke kūpaʻa kiʻekiʻe-mehana, a me ka helu hoʻonui wela haʻahaʻa.Hana kēia mau waiwai i nā seramika i mea kūpono no nā ʻāpana lako semiconductor e koi ana i ke kūpaʻa wela a me ka pololei, e like me nā pae wafer a me nā chucks.

Pono:

- Kiʻekiʻe thermal paʻa a me ka ikaika
- Haʻahaʻa hoʻonui hoʻonui wela
- Kūleʻa ʻaʻahu kiʻekiʻe a me ka inertness kemika

Nā hemahema:

- Hiki ke ma'alahi a ma'alahi i ka pohā, i ka wā o ka mīkini a me ka lawelawe 'ana
- He mea paʻakikī ka hana ʻana a me ka hoʻoliʻiliʻi ʻana i nā seramika

3. Metala

Ua hoʻohana ʻia nā mea metala, e like me ke kila kila a me ka titanium, no kekahi mau ʻāpana semiconductor ma muli o ko lākou machinability maikaʻi loa a me ka ikaika kiʻekiʻe.Hoʻohana pinepine ʻia lākou i nā noi kahi i koi ʻole ʻia ai ke kūpaʻa wela kiʻekiʻe, e like me nā ʻāpana keʻena, nā hui, a me nā feedthroughs.

Pono:

- Machinability maikaʻi a me ka weldability
- Ka ikaika kiʻekiʻe a me ka ductility
- Ke kumu kūʻai haʻahaʻa i hoʻohālikelike ʻia i kekahi o nā mea ʻokoʻa

Nā hemahema:

- Kiʻekiʻe thermal hoʻonui coefficient
- ʻAʻole kūpono no nā noi wela kiʻekiʻe ma muli o nā pilikia hoʻonui wela
- Pilikia i ka ʻinoʻino a me ka haumia

Ka hopena:

I ka hōʻuluʻulu ʻana, ʻoiai he koho kaulana ka granite no nā ʻāpana lako semiconductor, ua puka mai nā mea ʻē aʻe, kēlā me kēia me nā pono a me nā hemahema.ʻO nā mea aniani-seramika ka pololei a paʻa akā hiki ke maʻalahi.He ikaika a loaʻa ka paʻa wela maikaʻi loa akā hiki ke palupalu, e paʻakikī loa i ka hana ʻana.ʻAʻole kūʻai ʻia nā metala, machinable, a me ka ductile, akā ʻoi aku ka nui o ka coefficient o ka hoʻonui ʻana i ka wela a hiki i ka corrosion a me ka haumia.Ke koho ʻana i nā mea no nā lako semiconductor, he mea koʻikoʻi ia e noʻonoʻo i nā koi kikoʻī o ka noi a koho i nā mea e kaulike ai ke kumukūʻai, ka hana, a me ka hilinaʻi.