He mea kaulana ʻo Granite i ka ʻoihana hana wafer ma muli o kona mau waiwai mechanical kūikawā a me ke kūpaʻa. He pōhaku kūlohelohe ia i eli ʻia mai nā lua pōhaku ma ka honua holoʻokoʻa a ua hoʻohana ʻia no nā kenekulia no nā kumu kūkulu like ʻole, me ka hana ʻana i nā lako semiconductor. Ma kēia ʻatikala, e kūkākūkā mākou i nā waiwai o ka granite a me kāna mau noi like ʻole i nā lako hana wafer.
Nā Waiwai o ka Granite
He pōhaku igneous ka Granite i haku ʻia me ka mica, feldspar, a me ka quartz. Ua kaulana ia no kona ikaika kūikawā, paʻakikī, a me ke kūpaʻa, e lilo ia i mea kūpono no nā noi e pono ai ke kiko kiʻekiʻe a me ka pololei. He haʻahaʻa ka coefficient o ka hoʻonui wela o ka Granite, ʻo ia hoʻi, ʻaʻole ia e hoʻonui a ʻaelike paha ma muli o nā loli o ka mahana, e lilo ia i mea paʻa loa. Eia kekahi, kūpaʻa ka granite i ka pala a me nā kemika, e lilo ia i mea kūpono no ka hoʻohana ʻana i nā ʻano ʻino.
Nā noi o ka Granite ma nā lako hana Wafer
He mea hoʻohana nui ʻia ka Granite i ka ʻoihana hana wafer ma muli o kona hui pū ʻana o nā waiwai. Eia kekahi o nā hoʻohana o ka granite i nā lako hana wafer:
1. Nā Mea Hana Metrology
Hoʻohana pinepine ʻia ka Granite i ka hana ʻana i nā mea hana metrology, e like me nā mīkini ana hoʻonohonoho (CMM) a me nā ʻōnaehana ana optical. Pono kēia mau mea hana i nā ʻili paʻa e hiki ke kū i nā haʻalulu a me ka wela. ʻO ke kiʻekiʻe o ka paʻakikī a me ka hoʻonui wela haʻahaʻa o ka granite e lilo ia i mea kūpono no ia mau noi.
2. Nā ʻūpā Wafer
Hoʻohana ʻia nā wafer chucks e paʻa i nā wafers i ka wā o ke kaʻina hana. Pono kēia mau chucks i kahi ʻili pālahalaha a paʻa hoʻi e pale ai i ka wafer mai ka piʻo ʻana a i ʻole ke kūlou ʻana. Hāʻawi ka Granite i kahi ʻili pālahalaha i paʻa loa a kū i ka piʻo ʻana, e lilo ia i mea maikaʻi loa no nā wafer chucks.
3. Nā Mea Hana Hoʻopili Kemika (CMP)
Hoʻohana ʻia nā mea hana CMP e hoʻopili i nā wafers i ka wā o ke kaʻina hana. Pono kēia mau mea hana i kahi kahua paʻa e hiki ke kū i nā haʻalulu a me ka wela. ʻO ke kūpaʻa maikaʻi loa a me ka hoʻonui wela haʻahaʻa o ka granite e lilo ia i mea kūpono no nā mea hana CMP.
4. Nā Lako Nānā Wafer
Hoʻohana ʻia nā lako nānā wafer e nānā i nā wafer no nā kīnā a me nā kīnā. Pono kēia mau mea hana i kahi ʻili paʻa a pālahalaha e hōʻoia i nā ana pololei. Hāʻawi ʻo Granite i kahi ʻili paʻa a pālahalaha e kūʻē i ka warping, e lilo ia i mea kūpono no nā lako nānā wafer.
Hopena
I ka hopena, he mea hoʻohana nui ʻia ka granite i ka ʻoihana hana wafer ma muli o kona mau waiwai mechanical kūikawā a me ke kūpaʻa. Hoʻohana pinepine ʻia ia i ka hana ʻana i nā mea hana metrology, wafer chucks, CMP tools, a me nā lako nānā wafer. ʻO ka hui kū hoʻokahi o nā waiwai e lilo ia i mea kūpono no nā noi e pono ai ke kiʻekiʻe a me ka pololei. Me kona mau pono he nui, ke noho nei ka granite i koho kaulana no nā lako hana wafer, a e hoʻomau ka hoʻohana ʻana i ka wā e hiki mai ana.
Ka manawa hoʻouna: Dec-27-2023