No ke aha e hilinaʻi ai nā lako Semiconductor i nā kumu Granite: ʻO ka mea huna ma hope o ke kūpaʻa ±0.001mm

I loko o ka ʻoihana semiconductor, ʻaʻole wale ka pololei he ana hana—ʻo ia ke kumu o ke kaʻina hana holoʻokoʻa. Mai ka nānā ʻana i ka wafer a me ka lithography a hiki i ka hoʻonohonoho optical a me nā ʻōnaehana metrology, pono nā lako e mālama i ka pololei o ke kūlana paʻa loa. ʻOiai ka ʻokoʻa o kekahi mau microns hiki ke alakaʻi i nā hewa ana, ka nalowale o ka hua, a i ʻole ka hāʻule ʻana o ka hāmeʻa.

ʻO kēia ke kumu i lilo ai nā kumu granite i mea hoʻonohonoho koʻikoʻi i nā lako semiconductor. ʻIke ʻia no ko lākou paʻakikī kūikawā, ka damping vibration, a me ke kūpaʻa wela, hāʻawi nā ʻano granite ultra-precision i ke kahua kuhikuhi paʻa e pono ai e hoʻokō i ke kūpaʻa kūlana ±0.001 mm.

Ma ZHHIMG, hana mākounā kumu granite kiʻekiʻei hoʻolālā kūikawā ʻia no nā noi semiconductor a me metrology, e kākoʻo ana i ka hanauna hou o nā lako ultra-precision.

ʻO ka pilikia kikoʻī ma ka hana ʻana o Semiconductor

Hana nā kaʻina hana hana semiconductor ma nā pae liʻiliʻi loa. Hoʻopili ka nui o nā kaʻina hana hou i ka pololei o ke kūlana nanometer, ʻo ia hoʻi ke kumu kūkulu o nā lako e noho paʻa loa ma lalo o nā kūlana kaiapuni e loli nei.

ʻO nā pilikia koʻikoʻi:

• Hoʻonui ʻia ka wela i hoʻokumu ʻia e nā loli o ka mahana ambient

• Ka haʻalulu mai nā mīkini kokoke a i ʻole nā ​​​​hale kūkulu

• ʻO ka hoʻololi ʻana o ka mīkini ma lalo o nā ukana kaumaha

• Ka neʻe ʻana o ka dimensional lōʻihi

Inā paʻa ʻole ke ʻano o ke kumu, ʻaʻole hiki i nā mea ʻike holomua loa, nā motika linear, a i ʻole nā ​​​​​​mea optical ke mālama i ka pololei o ke kaulike.

ʻO kēia kahi e hāʻawi ai nā kumu granite ultra-precision i kahi pōmaikaʻi nui.

No ke aha ʻo Granite ka mea kūpono no nā kumu lako Semiconductor

1. Kūlana Paʻa Wela Kiʻekiʻe ma nā ʻōnaehana Metrology

ʻO kekahi o nā koi koʻikoʻi i nā lako semiconductor ʻo ia ka paʻa wela i ka metrology. Hoʻonui a ʻuʻuku nā mea i ka wā e loli ai ka mahana, kahi e hoʻopilikia pololei ai i ka pololei o ke ana ʻana.

He haʻahaʻa loa ka coefficient o ka hoʻonui wela o ka granite ʻeleʻele kūlohelohe kiʻekiʻe i hoʻohālikelike ʻia me nā metala he nui. ʻAe kēia i nā kumu granite e mālama i ke kūpaʻa geometric ʻoiai i nā wahi me nā loli liʻiliʻi o ka mahana.

No nā ʻōnaehana nānā semiconductor a me nā ʻōnaehana metrology e pono ai ka pololei sub-micron, he mea nui kēia kūpaʻa.

2. Hoʻemi haʻalulu kūikawā

Hoʻohui pinepine nā lako Semiconductor i nā ʻōnaehana neʻe wikiwiki e like me:

• Nā motika laina

• Nā pae hoʻoili ea

• Nā ʻōnaehana scan optical

• Nā modula hoʻonohonoho kikoʻī

Hoʻopuka kēia mau ʻōnaehana i nā micro-vibrations i ka wā e hana ana. Hāʻawi ke ʻano crystalline kūlohelohe o Granite i ka damping haʻalulu maikaʻi loa, e kōkua ana i ka omo ʻana a me ka hoʻokuʻu ʻana i ka ikehu wikiwiki loa ma mua o nā hale metala.

ʻO ka hopena, hoʻemi nā kumu granite i ka walaʻau i nā ʻōnaehana ana a hoʻomaikaʻi i ka pololei o ke kūlana.

3. Paʻa Kiʻekiʻe a me ke Kūpaʻa Ukana

Hiki i nā lako ultra-precision ke komo pū me nā ʻāpana kaumaha e like me:

• Nā modula ʻōpae

• Nā pae Wafer

• Nā ʻōnaehana vacuum

• Nā kahua neʻe kikoʻī

Hāʻawi ka Granite i ka ikaika compressive kiʻekiʻe a me ka paʻakikī o ke kūkulu ʻana, e hiki ai iā ia ke kākoʻo i nā ukana kaumaha me ka ʻole o ka deformation. ʻAʻole e like me nā hale metala, ʻaʻole hiki i ka granite ke hoʻokuʻu i ke kaumaha kūloko, ʻo ia hoʻi ke mālama nei i kona ʻano a me ka pololei i nā wā lōʻihi.

ʻO kēia ka mea i hana ai ka granite i mea kumu makemake ʻia no nā mīkini CMM, nā lako nānā semiconductor, a me nā ʻōnaehana hoʻonohonoho optical.

4. Ke kūpaʻa ʻana i ka palaho a me ke kūpaʻa lōʻihi

I loko o nā wahi lumi maʻemaʻe, pono e noho paʻa nā mea a ʻaʻohe haumia. He nui nā pono kūlohelohe o ka Granite:

• ʻAʻole makeneka

• Kūpaʻa i ka palaho

• ʻAʻohe popo

• Mālama haʻahaʻa

Hoʻopaʻa kēia mau waiwai i ke ola lawelawe lōʻihi a me ka hana hilinaʻi i nā wahi kikoʻī kiʻekiʻe e like me nā hale hana semiconductor a me nā keʻena hoʻokolohua holomua.

Nā Hoʻohana ʻana o nā Kumu Granite i nā Lako Semiconductor

Ma muli o kēia mau pono, hoʻohana nui ʻia nā kumu granite no nā lako semiconductor i:

• Nā mīkini nānā wafer

• Nā ʻōnaehana metrology semiconductor

• Nā kahua hoʻonohonoho optical

• Nā ʻōnaehana lithography subsystem

• Nā kahua neʻe ea

• Nā mīkini ana hoʻonohonoho kikoʻī (CMM)

I loko o nā ʻōnaehana holomua he nui, hana ke kumu granite ma ke ʻano he ʻili kuhikuhi mua, e hōʻoiaʻiʻo ana e mālama pono nā ʻāpana neʻe āpau i ke kaulike pololei.

Nā Hoʻonā Granite Kūpono Loa ZHHIMG

Ma ZHHIMG, loea mākou i ka hana ʻana i nā ʻāpana granite ultra-precision no nā ʻoihana semiconductor a me metrology. Ua hana ʻia kā mākou mau kumu granite e hoʻokō i nā koi koʻikoʻi o nā mea hana lako kiʻekiʻe.

ʻO nā pono nui o nā kumu granite ZHHIMG:

• ʻO ka granite ʻeleʻele ZHHIMG® kiʻekiʻe me nā waiwai kino kiʻekiʻe

• ʻO ka wili pololei a me ka lapping no nā ʻili pālahalaha loa

• Hoʻohui maʻamau o nā hoʻokomo wili, nā lua ea, a me nā hiʻohiʻona kau pono

• Ka mana o ke kaiapuni i ka wā o ka hana ʻana no ka pololei kiʻekiʻe o ka dimensional

• Nā nui a me nā ʻano hana maʻamau no ka hoʻolālā ʻana i nā lako semiconductor

Hoʻohana nui ʻia kā mākou huahana e nā mea hana lako honua i nā ʻoihana semiconductor, laser, a me ka optical, e hāʻawi ana i nā kahua kūkulu hilinaʻi no nā ʻōnaehana ultra-precision.

Ke Kumu o ka ʻenehana Ultra-Precision

ʻAʻole hiki ke hoʻokō i ke kūpaʻa ±0.001 mm me ka ʻole o kahi kahua paʻa. Hāʻawi nā kumu Granite i ke kūpaʻa mechanical, ka hoʻokaʻawale haʻalulu, a me ka hilinaʻi thermal e pono ai no nā lako semiconductor hou.

I ka hoʻomau ʻana o ka ʻenehana semiconductor i ka holomua i nā kikowaena liʻiliʻi a me ka pololei kiʻekiʻe, e mau ana nā ʻano granite ultra-precision i mea koʻikoʻi i ka metrology hana kiʻekiʻe a me nā ʻōnaehana hana.

No nā mea hana lako e ʻimi nei i nā ʻāpana kūkulu paʻa a hilinaʻi hoʻi, ʻaʻole wale nā ​​​​kumu granite he koho—he mea pono lākou.