Nā ʻāpana granite o ka paepae neʻe gantry precision XYZT: paʻa ma lalo o ke kaumaha kiʻekiʻe.

I ka hana ʻoihana, ʻoi aku hoʻi i nā hiʻohiʻona me nā koi kiʻekiʻe a me ka hoʻomau, pono pinepine ka paepae hoʻoneʻe gantry precision XYZT e hana ma lalo o ke kaumaha kiʻekiʻe a me ka hana mau no ka manawa lōʻihi. I kēia manawa, ua lilo ka paʻa o nā ʻāpana granite i mea nui i ka hōʻoia ʻana i ka hana paʻa o ka paepae.
ʻO ke kūpaʻa o ke kūkulu ʻana e hōʻoiaʻiʻo i ka lōʻihi
Ma hope o nā piliona makahiki o nā loli honua, ua hoʻonohonoho pono ʻia nā kristal mineral kūloko, e hana ana i kahi ʻano paʻa loa a like. Ma lalo o nā kūlana ukana kiʻekiʻe, hiki i nā ʻāpana mea maʻamau ke hana i ka deformation kūkulu kūloko ma muli o ke kaomi, e hopena ana i ka pololei haʻahaʻa a i ʻole ka hōʻino ʻana i ka paepae. Hiki i nā ʻāpana Granite ke hoʻoponopono maʻalahi i nā pilikia ukana kiʻekiʻe ma muli o ko lākou ikaika compressive kiʻekiʻe. Hōʻike ka ʻikepili noiʻi hiki i ka ikaika compressive o ka granite kiʻekiʻe ke hiki i ka 200-300MPa, hiki ke kū i ke kaomi o ke kila maʻamau me ka ʻole o ka deformation koʻikoʻi. Ke lawe nei i kahi ʻoihana hana ʻāpana mokulele nui ma ke ʻano he laʻana, ʻo ka paepae neʻe gantry precision XYZT i hoʻohana ʻia e ka hui e hoʻomau i ke kākoʻo mau i nā ʻāpana granite i ka wā e hana ana i ka pahu mīkini mokulele e kaupaona ana i kekahi mau tona. I ka wā o ke kaʻina hana hoʻomau a hiki i 10 mau hola, ua kāohi mau ʻia ka hewa flatness o ka paepae i loko o ± 0.05mm. Hōʻoiaʻiʻo ia i ka hoʻopau maʻalahi o ka wili ʻana i ka precision kiʻekiʻe, ka wili ʻana a me nā kaʻina hana ʻē aʻe, kahi e hōʻoia piha ai i ka hiki maikaʻi loa o nā ʻāpana granite e mālama i ke kūpaʻa kūkulu ma lalo o ka ukana kiʻekiʻe.
Ke kūpaʻa ʻana no ka hana lōʻihi
ʻO ka hana lōʻihi e hoʻomau nei, ʻo ia hoʻi ka hakakā pinepine ma waena o nā ʻāpana e neʻe ana, kahi e hoʻāʻo nui ai i ke kūpaʻa o ka ʻaʻahu o nā ʻāpana. ʻOi aku ka paʻakikī o Granite, ʻo ka paʻakikī Mohs he 6-7 maʻamau, hoʻohālikelike ʻia me nā mea metala he nui i ʻoi aku ka paʻakikī i ka ʻaʻahu. I ka hana maoli, e like me ke kahua XYZT o ka hale hana hana mold kaʻa, pono e hana pololei ʻia nā billet mold nui i kēlā me kēia lā, a holo ka paepae a hiki i 16 mau hola i ka lā. Ma hope o ka nānā ʻana i ka hoʻohana lōʻihi, ʻoi aku ka liʻiliʻi o ka ʻaʻahu o nā ʻāpana granite, ma hope o 10,000 mau hola o ka hana mau, ʻo ka ʻaʻahu o ka ʻili o ka granite i ka hoʻopili ʻana me nā ʻāpana neʻe o ka paepae he 0.02mm wale nō, ʻoi aku ka haʻahaʻa ma mua o nā mea metala maʻamau, e hōʻemi pono ana i ka emi ʻana o ka pololei i hoʻokumu ʻia e ka pinepine o ka ʻaʻahu a me ka mālama ʻana i nā lako, e hōʻoia i ka hana paʻa lōʻihi o ka paepae.
Kūlana palena i kōkua ʻia e ke kūpaʻa wela
He mea nui ka hana wela o nā lako i ka wā o ka hana ukana kiʻekiʻe, a ʻo ka loli o ka mahana e hoʻopilikia maʻalahi i ka hana o nā ʻāpana. He haʻahaʻa loa ke koina hoʻonui wela o ka granite, ma ke ʻano maʻamau ma 5-7 ×10⁻⁶/℃, a he liʻiliʻi nā loli o ka nui ma lalo o nā loli nui o ka mahana. I ke kaʻina hana photolithography o kahi ʻoihana hana chip uila, pono ka paepae neʻe gantry precision XYZT e lawe i nā lako photolithography kiʻekiʻe no ka manawa lōʻihi, kahi e hoʻopuka ai i ka nui o ka wela ke hana nā lako, a hiki ke piʻi ka mahana o ka hale hana ma 5-10℃ i ka manawa pōkole. Ma kēia ʻano, ua noho paʻa mau ke kahua i kākoʻo ʻia e nā ʻāpana granite, me ka ʻole o ka deformation thermal maopopo ma muli o nā loli o ka mahana, e hōʻoiaʻiʻo ana i ka pololei nanoscale o ka chip lithography, e hoʻokō ana i ka hana ultra-long a me ka paʻa o 20 mau hola i ka lā, e uhaki ana i ka palena o ka manawa hana o nā kahua mea maʻamau like, e hōʻike ana i ka pono o ka lōʻihi o nā ʻāpana granite i nā ʻano thermal paʻakikī.