Kumu Granite Precision Ultra no ka Nānā Wafer & Metrology

1. ʻEpekema Mea Kiʻekiʻe Loa: ZHHIMG® Granite ʻEleʻele

ʻAʻole e like me ka granite maʻamau a i ʻole, ʻoi aku ka ʻino, ke kinikini haʻahaʻa i hoʻohana ʻia e nā mea hana ʻaʻole akahele loa, ua kūkulu ʻia nā kahua ZHHIMG mai kā mākou ZHHIMG® Black Granite ponoʻī.

● Ka nui kūikawā: ʻOi aku ka nui o kā mākou mea ma mua o ≈ 3100 kg/m³, ʻoi aku ka maikaʻi ma mua o nā granite ʻeleʻele maʻamau mai ʻEulopa a me ʻAmelika.

● Paʻa Wela: ʻO ke kiʻekiʻe o ka nui a me ka liʻiliʻi o ka omo ʻana o ka wai e hōʻoia i ke kūpaʻa kiʻekiʻe o ka dimensional, e hōʻemi nui ana i ka hopena o ka drift thermal i nā pōʻaiapuni nānā koʻikoʻi.

● Hoʻopau Haʻalulu: Hāʻawi ka ʻano mineral kūlohelohe i ka hoʻopau kūloko maikaʻi loa, he mea nui no ka hoʻokaʻawale ʻana i nā optics koʻikoʻi a me nā mea ʻike mai ka haʻalulu o waho.

2. Ka Mana Hana a me ka ʻAhahui Kūikawā ʻole

Ua hōʻuluʻulu ʻia kā mākou kūpaʻa i ka pololei e ko mākou manaʻoʻiʻo koʻikoʻi: "ʻAʻole hiki i ka ʻoihana pololei ke koi nui."

● Hana Lima Akamai: Hoʻopili lima ʻia kā mākou mau kumu e nā loea akamai, he nui me nā makahiki he 30 a ʻoi o ka ʻike, hiki ke hoʻokō i ka pālahalaha o ka ʻili a me ka parallelism a hiki i ka pae nanometer—ua hōʻoia ʻia ka pololei e Renishaw Laser Interferometers a me WYLER Electronic Levels.

● Kaiapuni i Kāohi ʻia: Hana ʻia ka mīkini a me ka ʻākoakoa hope loa i loko o kā mākou lumi maʻemaʻe i kāohi ʻia i ka mahana a me ka haʻahaʻa he 10,000 m² (e hoʻohālike ana i nā kūlana hana semiconductor paʻa). Loaʻa i kēia hale kahi kahua sima mānoanoa he 1000 mm a me nā ʻauwaha anti-vibration hohonu he 2000 mm, e hōʻoiaʻiʻo ana i kahi kaiapuni metrology paʻa maoli.

3. Hoʻolālā Kūpono i Hoʻohui ʻia (E like me ka mea i hōʻike ʻia ma ke kiʻi)

Hoʻolako pinepine ʻia ke kumu ma ke ʻano he ʻaha paʻakikī, pinepine pū me:

● Nā ʻAno L/Nā Hana Gantry: Hoʻolālā ʻia e kākoʻo i ka neʻe ʻana o ke kū pololei (axis Z) o nā poʻo kiʻi, e hōʻoiaʻiʻo ana i ka orthogonality a me ka pololei geometric.

● Nā Grooves & Inserts Precision: Nā ʻili i hana mua ʻia me nā hoʻokomo kila wili a me nā lua dowel pololei no ke kau ʻana i nā bearings ea, nā motika linear (XY Table), nā ʻōnaehana ʻike, a me nā ala alakaʻi (THK, HIWIN, Rexroth).

● Hoʻopilikino: He loea mākou i ka mīkini nui, hiki ke hāʻawi i nā kumu granite monolithic a hiki i 20m ka lōʻihi a me 100 tons ke kaumaha, i hana pono ʻia i kāu envelope lako.